Reference SAW oscillator on quartz-on-silicon (QoS) wafer for polylithic integration of true single chip radio

This paper presents an electro-acoustic circuit fabricated on quartz directly bonded on the processed silicon wafer (QoS), which allows us to polylithically integrate high precision passives with integrated circuits. We first fabricated a prototype SAW resonator and oscillator on thick QoS. The SAW resonator on QoS shows Q about 10,000 and 11 dB insertion loss at 289 MHz, and SAW oscillator on QoS shows phase noise as small as 120 dBc at 10 kHz offset, demonstrating the feasibility of a true single chip radio.