A micro-electro-mechanically (MEM) switched microstrip ring resonator

Electronically switchable microwave and millimeter wave filters are required for a variety of microwave and millimeter wave systems. In this paper, we report a millimeter wave microelectro-mechanically (MEM) switched ring resonator for electronically switchable bandpass filter applications. RF MEM switches used in this circuit have better than 0.2 dB insertion loss at the resonator pass band around 31.1 GHz. The integration of these low-loss switches and a tight coupling gap enabled us to demonstrate a low (<0.9 dB) transmission loss resonator in its pass band. This is the first demonstration of the monolithic integration of the RF MEM switches with microstrip-based planar circuit components.