Low actuation voltage RF MEMS switches with signal frequencies from 0.25 GHz to 40 GHz

A novel low-voltage radio-frequency microelectromechanical system (RF MEMS) switch is reported. The device switching voltages are 14-17 volts. When the device is operated in an 'on' state, an insertion loss of less than 0.5 dB with a return loss of -15 dB at 40 GHz was measured. When operated in its 'off' state, an isolation of better than 27 dB over the frequency band from 0.25 GHz to 40 GHz was achieved. The RF MEMS switch equivalent circuit model shows that the 'on' resistance is 0.3 /spl Omega/ and the 'off' capacitance is 90 fF, which results in a figure of merit of 6000 GHz.