Integration of Au-SnO2 nanocomposites with power efficient MEMS substrate for acetone sensing

In this paper we report synthesis of Au-SnO
₂
nanocomposites, and their integration on micro-hotplates through dip pen nano-lithography to realize a resistive acetone sensor device. The devices are power efficient (8.2°C temperature increase requires for 1 milli watt of power). The devices were characterized exposing acetone in presence of both dry and humid (40% RH) air. The response varies between 3.8 times (with 250 ppm) and 5.5 times (1000 ppm), and did not show much deterioration in presence of humidity.