Highly sensitive WO3 thin films integrated on microsensor platforms for ppb BTEX detection in a gas mixture with high rate of humidity

The detection of air quality pollutants as BTEX gases under real conditions can be influenced by the humidity in the air and the presence of interfering gases. The humidity often limits the performances of gas sensors, particularly in terms of sensitivity. Using a sensitive layer of 50 nm of tungsten trioxide on a new micro hotplate transducer designed in our laboratory, very low BTEX concentrations mixed with interfering gases in a humid atmosphere were detected and quantified. These new sensors can detect up to 20 ppb BTEX gas at 80% humidity with a low standard deviation (0.3).