Investigation of housing on packaged MEMS wind sensors for industrial application

This paper investigates the influence of packaged housing on the output characteristic of MEMS wind sensor. The sensor with and without packaged housing is tested, respectively. The measured results show that the voltages Vx and Vy with the cover are both a little larger than that without housing for the wind speed less than 20m/s. When the speed exceeds 20m/s, the output voltage without housing becomes larger. In addition, the wind with and without packaged housing are also tested in different directions at speed of 8m/s and sine relationship is obtained. The experiments demonstrate that situation speed is reduced and the measuring range is narrowed by the packaged housing.