On-chip magnetoresistive sensors for detection and localization of paramagnetic particles

This paper presents the work towards miniaturized magnetic biosensor array based on the detection of paramagnetic particles using the giant magnetoresistance (GMR) effect. GMR sensors have been studied for many years, but its application for on-chip integration and in complex configurations, as well as effective localization for Lab-On-Chip and Tissue Engineering applications is not yet explored. This work demonstrates the development of initial prototypes of 5 and 9 sensor GMR arrays of varying geometries and corresponding calibration and localization algorithms to detect and localize paramagnetic materials in 2D. The generation of a uniform magnetic field using a 16 magnet Halbach cylinder was also analyzed and optimized using FEA for different sensor configurations. Results show excellent localization for the fully calibrated 5 sensor arrays, with a mean (SD) error of 2.45 (1.61) mm for the ferrofluid as compared to 1.48 (1.14) mm for a strong ferromagnet for a 25×25mm² array surface. The 9sensor array similarly showed good results for full calibration.