Reduction of amplitude ratio dependence on drive level in mode localized resonant MEMS sensors

For the first time, this paper highlights the dependence of amplitude ratio on the drive power in mode localized sensors. The simulation and experimental results show that the amplitude ratio measurements are least sensitive to drive power variations in the veering zone (where the two resonators are matched in stiffness and mass). This observation is a potential pathway to high resolution long term measurements in mode localized sensing.