Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization

A microwave nano-probing station incorporating home-made MEMS coplanar waveguide (CPW) probes was built inside a scanning electron microscope. The instrumentation proposed is able to measure accurately the guided complex reflection of 1D devices embedded in dedicated CPW micro-structures. As a demonstration, RF impedance characterization of an Indium Arsenide nanowire is exemplary shown up to 6 GHz. Next, optimization of the MEMS probe assembly is experimentally verified by establishing the measurement uncertainty up to 18 GHz.