Nanometer-length characterization with CMOS-MEMS scanning microwave microscopes

In this paper, we show characterization of nanometer-length feature samples with low cost CMOS-MEMS based integrated Scanning Microwave Microscope (SMM) and Atomic Force Microscope (AFM). The integrated SMM/AFM device, read-out circuitry, and measurement set-up are briefly explained and simultaneous AFM/SMM imaging results for graphene nano-flakes and carbon nanotubes, with nanometer features in both approach and lateral directions, are presented. The results show the capability of the SMM to reveal nanometer length features both in the approach and in the lateral directions.