The halo nMOSFET characteristics dependent on the gate profile

Device characteristics with a barrel-type gate profile caused by the proximity effect were investigated. We show that enhanced hot carrier degradation may result and a decrease of the gate to drain overlap capacitance may occur because of the offset region between the LDD region and the gate electrode. Finally we have recommended a method of measuring gate line width (CD, Critical Dimension) for more precise expectations of the device characteristics.