Quantitative Elemental Mapping of Stainless Steel Using an Imaging Filter

The elemental mapping of a sensitized stainless steel has been performed using a field emission transmission electron microscope equipped with an imaging filter. Quantification of an elemental map is performed on the basis of three energy filtered images for each element within the thickness range of 0.3 to 0.5 times the mean free path of the inelastic scattering. For Cr, Fe and Ni, quantitative elemental maps are observed near the grain boundary. The results agree fairly well with those obtained using TEM with EDX.