The effect of collisions on pulsed and DC plasma immersion ion implantation

Plasma Immersion Ion Implantation (PIII) is an emerging implant technology for high dose and low energy applications. Because implantation and plasma generation occur at the same pressure, PIII implants generally operate in the mtorr range. At this pressure, ion-neutral collisions in the sheath significantly affect the implant. Previous work has concentrated on the implant ion distribution. Through Monte Carlo simulation, three new issues will be addressed: neutral energies for PIII implants, the effect of collisions on dose rate, and the effect of collisions on measured target current.