Modification of metals and hard coatings using vacuum-arc metal ion implantation

The improvement of service properties after metal ion implantation is demonstrated using real-world examples. The improvement is caused by the formation of specific structural-phase states in the implanted zone (IZ). The formation of defect structures beyond the IZ, called the long-range effect, is found in metals of high plasticity and low yield strength and in high strength materials such as TiN. Experimental results from TiN coatings are presented together with a model explaining the formation of the defect structure beyond the IZ. The residual stress in TiN made by PVD is modified after implantation but with no effect on the grain structure, whereas the residual stress is not changed in CVD TiN but the growth of fine grains is observed within the original grains.