Measurement for divergence angle of ion beams extracted from the Bernas type ion source

Divergence angle of ion beams extracted from the Bernas type ion source was measured by a movable Faraday cup for beam energy of 5 keV to 45 keV. High bias voltage of -5 kV to -35 kV was applied on a suppression electrode for obtaining low energy high current ion beams. The measured divergence was compared with computed divergence. Considerable increase of extracted ion beam current was obtained without remarkable divergence by applying high bias voltage on the suppression electrode.