Optimization of the delivery system for SDS/sup R/ gas sources used in ion implantation

Sub-atmospheric gas sources for ion implantation have been in commercial use in new and installed base systems since 1994. Many of the implanters in the installed base were not originally configured to efficiently utilize this new sub-atmospheric gas source. Proper use of manual leak valves or the upgrade to flow controllers specifically designed for use with SDS gas sources appreciably increase the efficiency of the dopant gas extracted. Implementation and use of appropriate pressure monitoring devices also increases the amount of dopant gas extracted. This paper provides an application guide for the optimization of the implanter gas delivery system for SDS gas sources through changes in components and procedures. Cylinder lifetime data with pressure measurements for accurate empty cylinder detection is also included.