Versatile Bezier bends for silicon photonics

We report on the design and fabrication of silicon Bezier bends for the communication wavelength of 1550 nm. By varying the Bezier parameter B, the bend losses can be controlled for different bend radius. At a bend radius of 2 μm, bend losses of 0.0652 to 0.269 dB per 180
^o
bend is experimentally demonstrated for the TE polarization using silicon channel waveguide with width 500nm, and height 220nm for B = 0.2–0.45.