Improvement of transmittance in silicone at vacuum ultraviolet region by irradiation with 172 nm Xe2* lamp

Silicone is known to be converted to silica like structure by VUV irradiation. In this study, we investigated on behaviors in vitrified process of silicone by VUV irradiation and changes of transmittance at VUV region. As a result, we confirmed silicone was converted to silica like structure with the irradiation dose increasing by TOF-SIMS and FTIR analysis. We also confirmed transmittance of silicone at VUV region was increased with the irradiation dose increasing because absorbance coefficient of the PDMS at VUV region is decreased by the vitrification. In addition, thin film vitrified layer has no cracks and keep flat surface. These results indicate the possibility that the vitrified silicone can be used as a low cost material for application at VUV range.