Multi template matching-based drift compensation for electron beam induced deposition

This work presents a template matching-based approach tackling image drift during Electron Beam induced Deposition of nano-granular metal structures. An automation sequence including a drift compensation routine is implemented using a self-developed software framework. A template matching algorithm simultaneously processing multiple templates adapts to the continuously changing image periodically acquired by the scanning electron microscope during the deposition process and thus avoids blurred depositions due to template matching errors.