Monolithic integration of waveguide photodiodes (WGPD) with vertically integrated AlGaAs waveguides

We designed a three-guide-layer AlGaAs chip consisting of a lower layer facilitating end-fire coupling, a middle layer for high confinement waveguides and a top SQW-based waveguide photodiode layer. We simulated an overall conversion efficiency of 95% and a responsivity of 0.8 A/W for the WGPD.