Optical characterization of surface oxide in Ge-Sb-Te alloy films

Ge-Sb-Te alloy film phase change recording layer can deteriorate the cyclability and it can be reduced with the nitrogen treatment. It is reported that the jitter characteristics over read-write cycle has been greatly improved. In the present research, the evolution of the surface oxide in Ge-Sb-Te alloys including nitrogen doped ones is investigated. The variation of the observed reflectivity spectra is compared with the calculated one.