Optimization of RF MEMS phase shifter for microwaves applications

There is currently a demand for millimeter wave (mmW) high data-rate communication systems that present characteristics such as small area, low power consumption and low cost. In this paper a 3-bit phase shifter design based on distributed microelectromechanical systems (MEMS) and slow-wave coplanar transmission lines (S-CPW) is proposed. The phase shifter was designed following the design rules of the AMS 0,35μm CMOS technology. The results for mechanical simulations in Ansys Workbench™, electromagnetic simulations in Ansys HFSS™ and circuit simulations in Agilent ADS™ are shown and commented. The simulations return a high figure of merit of 176°/dB with an area of 0.37mm
²
. Finally, the layout done in the Cadence Virtuoso™ has been sent to a foundry and the results of the measurements made on the fabricated device are also shown in the article.