Sensors element on base of the relief Au-coated GaAs grating

This work presents research of the sensors element refractive index. Presented sensor element consists of the one-dimensional relief Au-coated GaAs grating. The grating parameters have been optimized to maximize angular sensing signal using RCWA method. High sensitivity due to plasmon polariton resonance was observed under TM polarization. The optimized grating was manufactured using method of photo stimulated etching (GaAs gratings structure) and vacuum deposition method (Au coating).