Multi-parameter optimization of vented CMUTs for airborne applications

This paper reports vented CMUTs with wide bandwidth and high sensitivity, optimized by multi-parameter optimization method. The dominated parameters, including the radius and thickness of the flexible plate, gap height, and the size and distribution of vented holes have been individually optimized. The impedance measurements well-match the simulation results. Then the multi-parameter optimization method in place of the individual parameter optimization method is used to optimize the design parameters all together. Finally, keeping the approximate bandwidth, the multi-parameter optimization makes the sensitivity improved by 11% at the same percentage of pull-in voltage, and driving voltage is lowered by 49% compared with the individual parameter optimization.