Surface tension powered self-assembly of 3-D micro-optomechanical structures

A new surface micromachining process for surface tension powered self-assembly of silicon-based microstructures is described. Mechanical parts are formed from bonded silicon-on-insulator material and rotated out-of-plane by melting photoresist pads at tow temperature. Simple mechanisms that allow accurate control of the final angle are introduced and used to construct fixed 45/spl deg/ mirrors and scanning mirror assemblies.