Miniaturized VHF quartz MEMs resonator design methodology

The miniaturization of resonators for timing applications brings with it new challenges in terms of device optimization. As the device size is reduced, design intolerances lead to more significant differences between modeled and fabricated devices leading to poor performance. In this paper we present a methodology for improving resonator designs. A 32MHz AT-cut quartz thick VHF shear mode resonator is optimized for high Q and high thermal stability for integration on CMOS electronics. Uncompensated measured data agrees to within a few ppm of Comsol 3-d FEA simulations.