Preparation of DLC films using microwave plasma CVD in open-air

Diamond-like carbon films (DLC) were deposited on both the Si(100) and stainless steel substrate by means of Microwave Plasma enhanced chemical vapor deposition (PECVD) under the open-air. From the XPS measurements, the sp
²
/(sp
²
+sp
³
) ratio of the DLC film is similar to that of the film grown by the conventional PECVD. In the pulse-modulated microwave PECVD growth at the duty ratio 30%, the impurity incorporation into the film reduced.