Personal-CIM system to monitor ULSI R&D line for process engineers

In this paper, a personal-CIM system to improve the efficiency of experiments on ULSI development in the ULSI R&D line is described. We have developed the personal-CIM system which works in cooperation with a Manufacturing Execution System (MES) in order to reduce the preparation time for an experiment performed by each engineer on semiconductor technology. The personal-CIM system is realized by developing an acceptance agent, an inspection agent and a report agent. As the personal-CIM system acts as a private secretary who examines faithfully variable conditions in the ULSI R&D line instead of each engineer, the engineer gets various information in a timely manner that is needed to prepare for his or her experiment.