Analysis of DMTL phase shifter using RF MEMS power sensor

RF MEMS power sensor is used to sense the input power absorbed by MEMS membrane and this measurement is used to improve the performance of DMTL phase shifter which is designed to produce required phase shift at 15 GHz. The DMTL phase shifter is designed by loading the CPW transmission line with number of RF MEMS shunt switches with equal spacing and the phase analysis sensed by the power sensor contribute to increase the characteristics of the DMTL phase shifter. The analysis is carried out for a single switch and extended for DMTL phase shifter which consists of 28 number of RF MEMS switch. The design results in average return loss of -38 dB and the insertion loss less than -0.5 dB at 15 G Hz.