Laser voltage imaging and probing, efficient techniques for scan chain verification in advanced node

Laser voltage imaging (LVI) and laser voltage probing (LVP) are laser stimulation techniques to verify a device under test (DUT) and have been widely used for scan chain circuit debugging and various frequency-dependent failure modes. In the case of complex logic failures in advanced technology nodes, defect localization continues to be a challenge in the failure analysis field. Dynamic electrical failure analysis (D-EFA) techniques and their derivatives can increase efficiency for defect localization techniques. In this paper, several scan chain failure studies will be demonstrated by using LVI and LVP techniques, and the waveform analytic data will also be described by further physical failure analysis (PFA).