3D inductors with nanowire through substrate vias

This paper presents a novel 3D inductor (solenoid) fabricated on a 50-pm thick AAO membrane using nanowire-vias. Several inductors were fabricated in this simple and low-cost technology with nanowires. They were measured up to 110 GHz and compared to the state-of-the-art results presented in the literature in different technologies: CMOS, glass, LCP and MEMS. The simulations are in good agreement with measurement, predicting the great potential of these inductors. The first 3D inductors using nanowire-vias presented inductances from 0.5 nH to 1.7 nH with small areas that range from 0.03 mm
²
to 0.08 mm
²
.