Behavioral modeling and characterization of silicon photonic Mach-Zehnder modulator

Compact behavioral models for silicon photonic Mach-Zehnder modulators (MZM) are developed for SPICE compatible electro-optical co-simulation. The model captures electro-optical interactions and dynamics, optical insertion loss and thermo-optical effect. Behavioral model simulation results and measurement results are shown to be a highly match. The model will be an indispensable part of the optical process design kit (PDK) which can be provided to the integrated circuit designers for hybrid simulation.