Systematic and random mismatch characterization in device arrays

A general methodology of device array mismatch characterization is introduced, analyzed and verified. Instead of measuring each device's parameter individually, the device array is configured as a data converter and the mismatch information is extracted from the differential linearity (DNL) of the converter. Systematic and random mismatch are characterized separately using the proposed decomposition method with robustness to additive measurement noise. An 8-bit high precision resistor array is fabricated in Globalfoundries 0.13μm TaN thin film resistor process. Measurement results show that systematic mismatch contributes to a large portion of the total mismatch when the matching accuracy comes down to 0.01% level.