Coherence in Multielement-Phased Vertical-Cavity Surface-Emitting Laser Arrays Using Resonance Tuning

We show that optical coupling can be achieved reproducibly and with high yield by resonance tuning the elements of substrate-emitting and top-emitting vertical-cavity surface-emitting laser arrays. The resonance tuning is enabled by electrical isolation of the lasing elements in the array, which in this paper is done by post fabrication processing. Prior to electrical isolation, the laser arrays exhibit incoherent optical properties. Using resonance tuning, both in-phase and out-of-phase coherent modes are observed.