Single-photon avalanche diode array with column-level time-to-digital converter for unmanned vehicle

This paper introduces a design of Geiger-mode SPAD array chip aiming at unmanned-vehicle LIDAR. In order to reduce the number of afterpulsings, active quenching is adopted to keep the SPAD off for a sufficiently long time after each avalanche. Through theory analysis and simulation, a TDC is shared by a column of SPADs to improve the fill factor of photosensitive parts. The monolithic array chip is designed in the SMIC 0.13 μm CIS CMOS technology. Simulations proved that the sensor has a frame rate of over 30 fps and a measurement range of 250 m above, while still keeping high measurement precision.