Deep-UV plasma emission in hollow-core photonic crystal fiber

In this paper, after reviewing results in the emerging plasma photonics field, we report on a strong plasma emission in the Deep-UV (DUV) range using gas mixture for development of a tunable and miniaturized UV radiation source using microwave-driven plasma-core photonic crystal fiber. Several spectral lines in DUV were produced by Ar-N
₂
-O
₂
plasmas and tailored by simply varying the gas ratio of this gas mixture. In addition, a planar technology was used to develop a special ring excitator for compact solution to sustain efficiently such plasmas with microwave power as low as the Watt-level.