An integrated magnetic programming technique for mechanical microresonators

Mechanical memory devices are needed for harsh environments where electronic components fail to operate. An integrated electro-thermal technique for local magnetic annealing, which enables post-production programming capabilities for mechanical micro-resonators is presented. It is verified by a prototype with ferromagnetic resonating elements suspended on top of a polysilicon resistive heater. The magnetization (M-H) loop, with and without post-fabrication annealing are measured to prove the validity of technique.