High throughput and parallel flow cytometer using microball lens integrated 3D microfluidic device

We report an ultrahigh throughput microflow cytometer which has 32 detection flow channels with 3D flow focusing for each channel. This flow cytometer is realized by integrating a high N.A. microball lens array with a 3D microfluidic device, which allows introducing cell samples into 32 sample channels. There are, 64 channels for sheath flow used for parallel lateral focusing and 32 sounding flows for parallel sounding focusing. All microchannels use only three inlets. Results show that a 95% yield rate by standard 10 μm bead detection has been achieved, and a throughput of 1,400,000 cell/sec has been accomplished on a single device.