High-Temperature Characteristics of 3-kV 4H-SiC Reverse Blocking MOSFET for High-Performance Bidirectional Switch

Novel 3-kV 4H-SiC reverse blocking (RB) metal-oxide-semiconductor field-effect transistors (MOSFETs) have been demonstrated for high-voltage bidirectional switching applications. To achieve RB capability, a series Schottky barrier diode structure was introduced onto the backside of the 4H-SiC MOSFET. The developed SiC RB MOSFET exhibits bidirectional blocking voltage over 3 kV and a differential specific on-resistance of 20 mQ · cm
²
at room temperature. In an inductive-load switching measurement, the RB MOSFET showed good turn-ON/-OFF characteristics at 1 kV. The bidirectional switch configured by the developed RB MOSFETs exhibited lower ON-state power loss than the series connection of the standard SiC MOSFETs at wide range of temperature and operation current, demonstrating the advantage of the SiC RB MOSFET as a high-performance bidirectional switch.