Design optimization of a microgyrocsope on standing surface acoustic waves

In this paper, the choice of optimal parameters of inertial masses used in a solid-state gyroscope (SSG) on standing surface acoustic waves (SAW) is considered. The results of a theoretical analysis of the standing wave field in a SAW resonator under the action of angular velocity are presented. Special attention is paid to the use of stress concentrators for which finite element models have been constructed and calculated. As a result, a set of criteria is provided to ensure the highest sensitivity of SSG on standing SAWs.