Room-tempearutre CO2 sensing based on interdigitated capacitors and resonant cantilevers

This paper compares a MEMS-based resonant cantilever and an interdigitated capacitor, both coated with an amino-functionalized sensing film, as room temperature carbon dioxide (CO
₂
) detectors. The sensor sensitivities at room temperature to CO
₂
are assessed as well as their cross-sensitivities to temperature and humidity. The effectiveness of an uncoated reference cantilever for temperature compensation is demonstrated, reducing the temperature sensitivity of the system by a factor of 300.