A biaxial resonant tilt sensor with two-stage microleverage mechanisms

This paper firstly reports a MEMS (micro-electro-mechanical systems) biaxial resonant tilt sensor with two-stage microleverage mechanisms. Two pairs of double-ended tuning fork (DETF) resonators are the sensing elements and they are integrated with a single proof mass. The two-stage microleverage mechanism possesses higher amplification factor than the single-stage counterpart. For biaxial tilt measurements, the decoupling beams are utilized to lower the cross impact. The proposed prototype has high sensitivity (X-axis: 4.351 Hz/deg and Y-axis: 5.257 Hz/deg) and low cross-axis sensitivity (X-axis: 0.180 Hz/deg and Y-axis: 0.202 Hz/deg) for a ±40 degree biaxial tilt angle range compared to state of the art.