High performance flexible tactile sensor array using a large area plastic nano-grating substrate

This paper firstly reports a high-performance flexible tactile-sensor array using a large-area plastic nanograting substrate. Using a large area 200 nm-pitch plastic nanograting substrate, we fabricated high-performance flexible tactile sensor array, which shows 220 % enhancement in sensitivity with <;0.29 device-uniformity standard deviation. Moreover, the fabricated sensor-array shows not only the pressure detectability even if the devices are bent with radius-of-coverture ROC = 10 mm, but also the high-robustness against repeated bending-release (>10
⁴
) with ROC = 4 mm. Finally, the large area fabricated prototype sensor-array showed the real-time capacitance change by various finger touches, including time and strength different impacts.