Vibration-to-electric energy conversion

A system is proposed to convert ambient mechanical vibration into electrical energy for use in powering autonomous low-power electronic systems. The energy is transduced through the use of a variable capacitor, which has been designed with MEMS (microelectromechanical systems) technology. A low-power controller IC has been fabricated in a 0.6 /spl mu/m CMOS process and has been tested and measured for losses. Based on the tests, the system is expected to produce 8 /spl mu/W of usable power.