Design and simulation of CMOS MEMS accelerometer behavioral model

This paper depicts the Design and behavioral Characterization of CMOS MEMS Accelerometer. MEMS (Micro-Electro-Mechanical systems) is the latest technology in which sensors at micro level are fabricated. In this paper CMOS MODEL is designed which imitate the working of MEMS Accelerometer. The Model thus designed in T-Spice, gives the behavioral Characterization of the Accelerometer. The advantage of designing this model is to integrate with the other models/sensors in various EDA tools. The CMOS model is working on 180 nm technology.