Performance analysis of MEMS resonator for filter application

A piezoelectric MEMS resonator was designed for 400 MHz frequency. The proposed resonator designed using perfectly matched layer to consider the anchor losses and calculating quality factor. This paper presents a type of MEMS resonator pair structure in the 400 MHz frequency range. Resonator was designed with piezoelectric material. The resonator pair was coupled by a matched layer for lower power losses and the design was ensured to maintain compact foot print. Simulation is carried out using Finite Element Method. The proposed resonator is modelled using piezoelectric transduction method. A single silicon is used as substrate layer followed by a piezoelectric material sandwiched between two aluminum electrodes.