High frequency analysis of monolayer spiral inductors

In this paper the micrometric spiral inductors will be numerically modelled and simulated in order to highlight the effects and phenomena which occur at high frequencies, namely in the frequency domain 1 - 20 GHz. At first the electric and magnetic field values inside the structure of the spiral inductor are represented and analyzed. Also, the specific parameters of these spiral inductors, namely the inductance L, the scattering parameters S and the quality factor Q are determined with the help of the ANSYS-HFSS program and their values are analyzed in order to identify and highlight the effects which arise considering the variation of some geometrical parameters of these spiral inductors.