Tunable filter and detector technology for miniature infrared gas sensors

MEMS tunable Fabry-Pérot filters are a key component for infrared microspectrometers and miniature gas sensors. Compared to other technologies, they have several advantages particularly with regard to miniaturization and optical throughput. This paper gives a short summary of the technology, packaging, system integration and closed loop operation. Several types with different spectral ranges and resolutions will be presented. Possible applications in gas analysis, based on own work and with reference to the literature, are also discussed.