System Design and Control of a Resonant Fast Steering Mirror for Lissajous-Based Scanning

This paper introduces a system and controller design of an electromagnetically actuated fast steering mirror (FSM) tailored for Lissajous trajectories. The proposed system enables an improved performance in terms of energy consumption and tracking precision. By individually tuning the stiffness of each scan axis of the proposed FSM system, the resonance frequencies are placed at the drive frequencies of the desired Lissajous trajectory. The design of a dual tone controller for feedback control is presented, and matched to the scanning trajectory and the tuned FSM dynamics. It is shown that compared with a state-of-the-art FSM system, the energy consumption can be reduced by a factor of 100 using the modified system structure and the dual tone controller. Vice versa, the maximum scan area is enlarged by a factor of 60. The resulting root mean square tracking error can be reduced by 48% as compared with the conventional FSM system.