Approach to scalable modeling for planar inductor using EM simulation and a few samples measurement

A new approach to building of a spiral inductor scalable model is proposed. In this approach metal layer conductance was determined using S-parameters measurement results. The scalable equivalent circuit of spiral inductor was obtained automatically by means of developed techniques for equivalent circuit extraction and optimal polynomial degree algorithm for approximation. Proposed scalable model was found to have a sufficient agreement with carried out measurement.